POLYUS R&DI
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VACUUM
EQUIPMENT
 Polyus Research & Development Institute has a great experience in development and manufacturing of customized vacuum technological equipment and special systems. Our equipment can be used to solve wide range of technological problems, such as:
- deposition of dielectric and protective films;
- vacuum welding, casting and annealing;
- ion cleaning and etching. We are ready to negotiate about your technical requirements and designs and deliver you required equipment to solve your technological problems.

We are ready to negotiate your technical requirements, design and deliver equipment to solve your technological problems.



Vacuum Annealing System

Vacuum The vacuum annealing system is designed to degas parts and assemblies of electronic devices in high oil-free vacuum under high-temperature heating. The system provides possibility to pump down charge and operating chambers in manual and automatic modes, to program, indicate, and record changes in resistance heater temperature.

Specifications
Residual pressure in charge chamber6.6 x 10-3 Pa
Residual pressure in operating chamber6.6 x 10-6 Pa
Maximum temperature in charge chamber250 °C
Maximum temperature in operating chamber900 °C
Accuracy of temperature keeping in operating area± 10 °C
Dimensions of operating area 180 x 250 mm
Maximum power consumptionno more than 40 kW


Indium Preparation and Deposition System

System The indium preparation and deposition system is designed for indium layers deposition on cement packages of electrovacuum devices in high vacuum. The system provides hydrocarbons-free high-vacuum pumping and fine-programmed indium melting and casting into 6 packages simultaneously.

Specifications
Ultimate vacuum 1.3 x 10-6 Pa
Rate of temperature rise5 °C/min
Maximum temperature in operating chamber360 °C
Accuracy of temperature keeping ± 5 °C
Residual pressure in operating chamber at 360°c no more than 6.6 x 10-4 Pa
Residual pressure in heated and degassed operating chamber in 24 hours after pumping stop no more than1.3 x 10-2 Pa
Maximum power consumptionno more than 15 kW


High-Vacuum System For Thermocompression Welding

System The vacuum system for thermocompression welding is used for vacuum-tight joint of heteroepitaxial structures with glass substrates by thermocompression welding in vacuum.
The vacuum system for thermocompression welding consists of the following main parts:
  • High-vacuum pumping system includes mechanical oil-free fore pump, absorption pumps, high-vacuum magneto-discharge pump and necessary lock valves
  • High-vacuum technological chamber for thermocompression welding
  • Control and power supply unit including vacuum meters, temperature drive unit and other devices
The system has an indicator showing pressing force on welded parts and can be used for technological research and small-size production. the system could be equipped with tools, fixtures and spare parts to meet customer's requirements.

Specifications
Parameter Value
Minimum residual pressure in vacuum technological chamber at 20 °C after preheating pumping system and chamber 4x10-6 Pa (5x10-8 mm Hg)
Time to achieve minimum residual pressure< 4 hours
Operating residual pressure at 650 °C in technological chamber 100...700 °C
Temperature range in operating area700 + 20 °C
Maximum temperature in operating area 10 °/min
Maximum temperature rise in operating area± 3 °C
Temperature stability in operating area0...20 kg-force
Range of pressing force on welded partsno more than 1.3 x 10-2 Pa
Power consumption 15 kW


3 Vvedensky St., Moscow, 117342, Russia
tel:+7 095 3330389 fax:+7 095 3330256
e-mail: mail@polyus.msk.ru

http://www.polyus.msk.ru